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单晶炉用热场材料

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单晶炉热场用碳/碳复合材料要求保温性能好,纯度高,耐硅蒸气腐蚀,使用寿命长。

The C/C composites used in the thermal field of singlecrystal furnace are required to have the characteristics of excellent thermal insulation, high purity, silicon vapor corro-sion resistance and long service life.