高纯石墨和高纯碳/碳产品
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半导体级高纯石墨及高纯碳/碳适用于品体生长、外延、离子注入和等离子刻蚀以及LED芯片生产过程，产品包括CZ热场加热器、堆塌、保温桶、导流简、PECVD承载框、硅外延载盘和MO(VD炉的品片载盘，流化床反应器和STCTCS氯化炉部件，具有纯度高、耐高温耐腐蚀等特点。
Semiconductor grade high-purity graphite and C/Cproducts are suitable for crystal growth/epitaxy, ion implan-tation, plasma etching and LED chip production. The productsinclude CZ thermalfield heater, pot, shield, guide shieldPECVD loading plate epitaxial growth loading plate of sili-con and chip loading plate of MOCVD furnace, fluidized bedreactor and STC-TCS hydrogenation furnace componentsThey are featured by high purity, high temperature resis-tance and corrosion resistance.
