高纯碳化硅涂层产品
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CVD-SiC涂层主要用于蓝宝石衬底设备的热场材料、GaN外延时衬底支撑基座等方面，具有纯度高、抗氧化、抗热震、耐腐蚀等特点。
CVD-SiC coating, mainly used for thermalfield materials of sapphire substrate equipmentand substrate base during GaN epitaxy, is featured by high purity, excellent oxidation resis-tance, thermal shock resistance and corrosion resistance.
